Shaping of Single Crystal Silicon Wafers
Description:... Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.
This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
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شماره کارت : 6104337650971516 شماره حساب : 8228146163 شناسه شبا (انتقال پایا) : IR410120020000008228146163 بانک ملت به نام مهدی تاج دینی