Gettering and Defect Engineering in Semiconductor Technology IV

• Author(s): M. Kittler, H. Richter,
• Publisher: Trans Tech Publications Ltd
• Pages: 660
• ISBN_10: 3035703019
  ISBN_13: 9783035703016
  
• Language: en
• Categories: Technology & Engineering / Materials Science / General ,

Description:...

The volume contains 78 contributions to the important field of semiconductor defect control and defect engineering.