Plasma Processing of Semiconductors

• Author(s): Paul Williams,
• Publisher: Springer Science & Business Media
• Pages: 613
• ISBN_10: 0792345673
  ISBN_13: 9780792345671
  
• Language: en
• Categories: Technology & Engineering / Electronics / General , Technology & Engineering / Electrical , Technology & Engineering / Manufacturing , Technology & Engineering / Materials Science , Science / Physics / Atomic & Molecular , Technology & Engineering / Technical & Manufacturing Industries & Trades ,

Description:... Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.