Crystalline Defects and Contamination

Their Impact and Control in Device Manufacturing III : DECON 2001 : Proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

• Author(s): Bernd O. Kolbesen, Electrochemical Society. Electronics Division,
• Publisher: The Electrochemical Society
• Pages: 362
• ISBN_10: 1566773636
  ISBN_13: 9781566773638
  
• Language: en
• Categories: Science / Physics / Crystallography , Technology & Engineering / Electronics / Circuits / VLSI & ULSI ,