Laser Microfabrication

Thin Film Processes and Lithography

• Author(s): Daniel J. Ehrlich, Jeffrey Y. Tsao,
• Publisher: Elsevier Science
• Pages: 587
• ISBN_10: 0122334302
  ISBN_13: 9780122334306
  
• Language: en
• Categories: Technology & Engineering / Materials Science / General , Technology & Engineering / Optics , Science / Chemistry / Physical & Theoretical , Technology & Engineering / Lasers & Photonics , Technology & Engineering / Manufacturing ,

Description:... This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.