Atomic Layer Deposition for Semiconductors

• Author(s): Cheol Seong Hwang,
• Publisher: Springer Science & Business Media
• Pages: 263
• ISBN_10: 146148054X
  ISBN_13: 9781461480549
  
• Language: en
• Categories: Science / Chemistry / Physical & Theoretical , Technology & Engineering / Electronics / Semiconductors , Computers / Hardware / General , Technology & Engineering / Power Resources / General , Technology & Engineering / Electronics / General , Technology & Engineering / Superconductors & Superconductivity , Computers / Hardware / Printers, Scanners & External Accessories ,

Description:... Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.