SIMOX

• Author(s): Maria J. Anc,
• Publisher: IET
• Pages: 143
• ISBN_10: 086341334X
  ISBN_13: 9780863413346
  
• Language: en
• Categories: Technology & Engineering / General , Technology & Engineering / Electrical , Technology & Engineering / Electronics / General , TECHNOLOGY & ENGINEERING / Electrical ,

Description:... SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing.